Optical MEMS: Devices and Applications

Hakan Ürey, Department of Electrical Engineering, Koç University, Istanbul, Turkey

Abstract: Moving micromechanical structures combined with laser light sources and micro-optics enable a number of powerful applications in display and imaging. Various electromagnetic and electrostatic actuator configurations are explored for high-performance scanning systems to achieve high-frequency and large deflections. I¹ll describe some of the sensor and actuator concepts developed in our lab and discuss the following on-going projects: (1) MEMS scanners for microdisplay applications, (2) FR4 as a new platform for optical-micromechatronics, (3) MOEMS Fourier transform spectrometers, (4) MEMS stages for microlens-array beam steering for medical imaging, (5) Bio sensors, and (6) Thermal sensor array.

About the speaker: Dr. Ürey is an Associate Professor at Koç University in Istanbul-Turkey. He received the BS degree from Middle East Technical University, Ankara, in 1992, and MS and Ph.D. degrees from Georgia Institute of Technology in 1996 and in 1997, all in Electrical Engineering. After completing his PhD, he joined Microvision Inc., Seattle as Research Engineer and he played a key role in the development of the Retinal Scanning Display technology. He was the Principal System Engineer when he left Microvision to join the faculty of engineering at Koç University, where he established the Optical Microsystems Research Laboratory (OML).

Dr. Ürey has published 6 edited books, 2 book chapters, 25 journal and more then 60 conference papers, and has 20 issued and several pending patents. His research interests are generally in the area of micro-optics and MEMS for 2D/3D display, imaging, and biological applications. He is a member of OSA, SPIE, and IEEE-LEOS. He received the Werner Von Siemens faculty excellence award from Koç University in 2006 and the TÜBA (Turkish Academy of Sciences) Distinguished Young Scientist award in 2007.

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